https://publications-cnrc.canada.ca/fra/voir/objet/?id=64f8a605-81d8-428e-ad5b-288612dc6a15
Applied Physics Letters, 6 novembre 1995, Volume : 67, Numéro : 19
High‐resolution x‐ray photoelectron spectroscopy (XPS) was used to study the chemical nature and physical distribution of N in oxynitride films formed by rapid...
Article de périodique (revue)