https://publications-cnrc.canada.ca/fra/voir/objet/?id=042cac2e-faff-489c-8a57-a2a790088ee4
Rechercher Bardwell, J. A; Rechercher Allegretto, E. M; Rechercher Mason, B; Rechercher Erickson, L. E; Rechercher Champion, H. G
Applied Physics Letters, 13 mai 1996, Volume : 68, Numéro : 20
A procedure has been developed for delineation of lateral variations in the doping of Si(100). The procedure relies on the fact that the thickness of...
Article de périodique (revue)