https://publications-cnrc.canada.ca/fra/voir/objet/?id=81f82cab-a0b4-47d7-8a42-684311aab471
Rechercher Hayashida, Misa; Rechercher Gunawan, Lina; Rechercher Malac, Marek; Rechercher Pawlowicz, Chris; Rechercher Couillard, Martin
Microscopy and Microanalysis, Cambridge University Press, 1 août 2015, Volume : 21, Numéro : S3
As semiconductor industries have implemented three dimensional (3-D) structures in order to improve device performance, i.e., to decrease power requirement and...
Article de périodique (revue)