https://publications-cnrc.canada.ca/fra/voir/objet/?id=25fb6f87-79e5-406b-b570-430a49e25a64
Solid-State Electronics, 1996, Volume : 40, Numéro : 1-8
Six-period superlattices of Si/SiO2 have been grown at room temperature using molecular beam epitaxy. With this mature technology, the ultra-thin (1-3 nm) Si...
Article de périodique (revue)