https://publications-cnrc.canada.ca/fra/voir/objet/?id=c769d491-f0c1-461a-a485-eb70ed3cfa06
Rechercher Belkouch, S; Rechercher Landheer, D; Rechercher Taylor, R; Rechercher Rajesh, K; Rechercher Sproule, G. I
1996 MRS Fall Meeting - Amorphous and Crystalline Insulating Thin Films–1996, Cambridge University Press, 1997
Silicon nitride films have been deposited with a single-magnet electron-resonance deposition system using nitrogen and silane as the reaction gases at...
Article de périodique (revue)