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Proceedings of the thirteenth annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing : 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York (ouvrira une nouvelle fenêtre)Sauvegarder cet élément : Proceedings of the thirteenth annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing : 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New Yorkhttps://catalogue-scientifique.canada.ca/record=1210926~S6*frcRechercher Cuomo, J. J; Rechercher Kelly, Roger; Rechercher Fastiggi, V. APublished for the American Vacuum Society by the American Institute of Physics, 1982Livre