https://publications-cnrc.canada.ca/fra/voir/objet/?id=a2a6b8c5-8374-42bc-9be1-b7343f234b6b
Rechercher Dalili, N; Rechercher Li, P; Rechercher Kupsta, M; Rechercher Liu, Q; Rechercher Ivey, D.G
Micron, 2013
The atomic diffusion mechanisms associated with metallurgical failure of TaRhx diffusion barriers for Cu metallizations were studied by in situ transmission...
Article de périodique (revue)