https://catalogue-scientifique.canada.ca/record=2172963~S6*frc
Rechercher Zhou, C; Rechercher Muller, C. J; Rechercher Deshpande, M. R; Rechercher Sleight, J. W; Rechercher Reed, M. A
yale univ new haven ct center for microelectronic materials and structures, 1995
The authors present a detailed description of the microfabrication and operation at room temperature of a novel type of tunnel displacement transducer. Instead...
Publication gouvernementale