https://publications-cnrc.canada.ca/fra/voir/objet/?id=7d4fc573-a94a-46c6-a6f2-99fe76c3fe34
Rechercher Ilie, Stefan T; Rechercher De Paoli, Greta; Rechercher Flint, Alexander; Rechercher Dominguez Bucio, Thalia; Rechercher Ginel-Moreno, Pablo; Rechercher Sagar, Jaya; Rechercher Ortega-Monux, Alejandro; Rechercher Lekkas, Konstantinos; Rechercher Rutirawut, Teerapat; Rechercher Mastronardi, Lorenzo; Rechercher Skandalos, Ilias; Rechercher Molina Fernández, Iñigo; Rechercher Kanellos, George T; Rechercher Cheben, Pavel; Rechercher Smith, Peter G. R; Rechercher Gates, James; Rechercher Gardes, Frederic Y
Smart Photonic and Optoelectronic Integrated Circuits 2022, SPIE, 5 mars 2022
Silicon nitride (SiNx), has been widely regarded as a CMOS photonics enabling material, facilitating the development of low-cost CMOS compatible waveguides and...
Article de périodique (revue)