https://publications-cnrc.canada.ca/fra/voir/objet/?id=f9bdf584-c07d-45df-a3a6-b075f0d84802
Rechercher Fetterly, Christopher R; Rechercher Olsen, Brian C; Rechercher Luber, Erik J; Rechercher Buriak, Jillian M
Langmuir, American Chemical Society, 3 avril 2018, Volume : 34, Numéro : 16
Electron beam lithography (EBL) is a highly precise, serial method for patterning surfaces. Positive tone EBL resists enable patterned exposure of the...
Article de périodique (revue)