https://publications-cnrc.canada.ca/fra/voir/objet/?id=21ebab3a-26c1-4232-afe7-41a6cb2f65de
Rechercher Dubowski, Jan; Rechercher Moisa, Simona; Rechercher Komorowski, B; Rechercher Tang, Haipeng; Rechercher Webb, James B
Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, SPIE, juin 2001
The ablative decomposition of GaN films induced with a XeCl excimer laser ((lambda) equals 308 nm) was investigated for a potentially low-damage surface...
Article de périodique (revue)