https://catalogue-scientifique.canada.ca/record=2100532~S6*frc
Rechercher Lin, Chuang-Chia; Rechercher Ghodssi, Reza; Rechercher Ayon, Arturo A; Rechercher Chen, Dye-Zone; Rechercher Jacobson, Stuart; Rechercher Breuer, Kenneth; Rechercher Epstein, Alan H; Rechercher Schmidt, Martin A
massachusetts inst of tech cambridge microsystems technology labs, 2006
This paper reports on a process to build, package, and instrument a 5-level wafer-bonded micro-machined turbine/bearing rig. The process flow involves the use...
Publication gouvernementale