https://publications-cnrc.canada.ca/fra/voir/objet/?id=cfa7b48d-2b0a-4b25-9f44-45ecd31597f6
Journal of Micromechanics and Microengineering, 2012, Volume : 22, Numéro : 9
We describe a new class of electrostatic actuators with a compliant electrode made of liquid metal alloy contained by a thin elastomeric membrane. We...
Article de périodique (revue)