army research lab adelphi md sensors and electron devices directorate, 2004
Piezoelectric microelectromechanical (MEMS) scale acoustic sensors have potential applications in a wide variety of applications including hearing aids,...
army research lab adelphi md sensors and electron devices directorate, 2008
The material properties of sol-gel lead zirconate titanate (PZT) are inherently linked with its crystallinity and texture. The use of seed layers and control...
army research lab adelphi md sensors and electron devices directorate, 2008
This report summarizes the effort to use modifications to a lead zirconate titanate (PZT) chemical solution process to create high performance ferroelectric,...
army research lab adelphi md sensors and electron devices directorate, 2007
The goal of this project is to characterize the dielectric and ferroelectric performance of lead zirconate titanate (PZT) thin film capacitors as a function of...
army research lab adelphi md sensors and electron devices directorate, 2008
This project is closely tied with the ongoing work of visiting Professor Kenn Oldham and the U.S. Army Research Laboratory's (ARL) joint effort on creating...
MEMS fabrication requires the release of compliant mechanical structures. A sacrificial layer is typically used to provide as a structural layer on which...
army research lab adelphi md sensors and electron devices directorate, 2007
The Army Research Laboratory (ARL) has designed, fabricated, and measured an eight element Ku-band radio frequency (RF) microelectromechanical system (MEMS)...
Photoacoustic spectroscopy is a useful monitoring technique that is well suited for trace gas detection. The technique also possesses favorable detection...
Microelectromechanical System (MEMS) phase shifters have been assembled in a connectorized packages for insertion in a 1x8 linear patch antenna array. The...
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