https://publications-cnrc.canada.ca/fra/voir/objet/?id=6ee134d9-b18b-4072-9c55-ee60d6d05b78
Surface & Coatings Technology, 10 mars 2000, Volume : 120-121
Tantalum oxide (TaOx) films were deposited by KrF excimer laser ablation of Ta2O5 targets in an oxygen gas ambient. The deposition was performed on silicon...
Article de périodique (revue)