https://publications-cnrc.canada.ca/fra/voir/objet/?id=40c53f07-bc23-4a48-9d1e-bf6ce6176d07
Rechercher Glinsner, T; Rechercher Veres, T; Rechercher Kreindl, E; Rechercher Morton, K; Rechercher Wieser, T; Rechercher Thanner, C; Rechercher Treiblmayr, D; Rechercher Miller, R; Rechercher Lindner, P
Microelectronic Engineering, Elsevier, 24 novembre 2009, Volume : 87
Nanoimprint lithography (NIL) is a fast replication technology for structures with sizes ranging from micrometer down to few nanometers range. This paper...
Article de périodique (revue)